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The present invention relates to the fabrication of integrated circuit devices, and more particularly, to a method for the formation of a self-aligned, high quality, tungsten plug.
(2) Description of the Prior Art
The use of tungsten plugs for interconnect structures in high density devices is known in the prior art. Typically, the tungsten plug is formed over a silicon dioxide pad oxide layer, which is formed over a silicon substrate. The silicon substrate is a lightly doped region between an N+ region and an Nxe2x88x92 region in the substrate. A titanium-tungsten compound is formed over the silicon dioxide pad oxide layer in an anisotropic dry plasma etch to form the tungsten plug. The titanium-tungsten compound
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